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The Keithley 590 C-V Analyzer measures capacitance versus voltage (C-V) and capacitance versus time (C-t) characteristics of semiconductor devices. Unlike other capacitance measurement instruments, the 590 has been tailored to the requirements of semiconductor device testing.
High frequency (100kHz or 1MHz) C-V measurements are commonly applied to test p-n or schottky junction and Metal-Insulator-Semiconductor (MIS) devices for device characterization and process control. C-V results are highly correlated with performance parameters of functional devices such as FETs, memory cells, CCDs, and isolation • 100kHz, 1MHz, or 100kHz/1MHz test structures.

C-V and C-t data are used to determine important characteristics such as semiconductor doping profiles, threshold voltage, oxide characteristics, mobile ion density, interface trap density, and minority carrier lifetime. The internal voltage source can supply up to 50mA from –20V to 20V with 5mV resolution in the waveforms C-V and C-t measurements require: DC, Stair, Dual Stair, and Pulse. Up to 200V can be supplied and monitored using an external source. Rear panel BNC trigger connectors can be used to coordinate timing with external sources such as the Keithley Model 230.

Excellent Sensitivity and Measurement Range

The excellent sensitivity (0.1fF and 0.1nS) and measurement range (20nF and 20mS) of the Model 590 meet test requirements of demanding applications such as characterization of very small, very large, leaky, or forward biased devices. The Model 590 is available with test frequencies of 1MHz (590/1MHz) or 100kHz (590/100k). The dual frequency Model 590/100k/1M provides the flexibility to select the required measurement frequency at the time of measurement.
All three 590 models use a 15mV rms test signal. Testing semiconductor devices with larger test signals can cause curve shape distortion and loss of detail. A 1MHz test frequency is traditionally specified in C-V test procedures requiring “high-frequency” device characteristics. In many cases 100kHz C-V measurements are replacing 1MHz as the standard, offering better accuracy (0.12% vs. 0.29%) and reduced errors due to cabling or device series resistance.

Keithley 590 Features

• 0.1fF sensitivity to test small devices.
• Ranges up to 20nF (at 100kHz, using 5904 adapter) to test large, leaky, or forward biased devices.
• Test signal voltage of 15mV rms.
• Choice of 1MHz frequency for compliance with existing test standards or 100kHz for improved resolution, range, and accuracy.
• Selectable measurement rate (1 to 1000 readings per second) and filter to optimize speed/resolution trade-offs.
• Built-in test setup and correction value storage, analysis, and plotter control to minimize computer programming.